最完整的EFA分析技术
确认失效位置的电性分析工具
Electrical Failure Analysis Tools for Fault Isolation
-
PKG
Wafer -
Speed /
Frequency -
LVP /
LVI -
Dynamic
testing
- DIE
- DIE
- PKG
-
MOS e-h+ pair
recombination
hot carrier -
Resistance
variation -
Thermal
radiation
-
EMMI InGaAs
( IR-detector )
SI -
OBIRCH
-
THEMOS
-
Dynamic & Static testing
-
DC-static
testing -
DC-static
testing
-
DIE
Wafer -
DIE
Wafer
-
Junction Leakage
Gox breakdown -
Interconnect
defects
-
EBIC
-
EBAC
-
1-2
probes -
1-2
probes
Die Lapping down to
via / contact level
via / contact level
-
Contact/
via -
Contact/
via -
Contact/
via -
MOS
I-V
-
AVC
-
PVC
-
C-AFM
-
Nano-
probe
-
DC
bias -
NO
bias -
1
probe -
8
probes